Integrated circuit with NMOS and PMOS transistors having different threshold voltages through channel doping and gate material work function schemes

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United States of America Patent

PATENT NO 9985029
SERIAL NO

15652925

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Abstract

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An integrated circuit comprising: first to third nMOS transistors with different threshold voltages, and first to third pMOS transistors with different threshold voltages, the nMOS transistors having channel regions made of silicon subjected to tensile stress and/or said pMOS transistors having channel regions made of SiGe subjected to compressive stress; a first well and a second well that are arranged underneath the nMOS transistors and underneath the pMOS transistors, respectively, with one and the same doping; two nMOS gate stacks comprising one and the same material, two of the nMOS gate stacks comprising materials having separate work functions, an nMOS gate stack having one and the same material as a pMOS gate stack, with the equation: Gp*Vdds−Gn*Gnds=Sn*|σn|+Sp*(|σp|−1.65*109)−VarCais+K.

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Patent Owner(s)

Patent OwnerAddress
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES25 RUE LEBLANC BAT LE PONANT 75015 PARIS 75015

International Classification(s)

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  • 2017 Application Filing Year
  • H01L Class
  • 30754 Applications Filed
  • 25260 Patents Issued To-Date
  • 82.14 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2017201820192020202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Andrieu, Francois Saint Ismier, FR 26 97

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Patent Citation Ranking

  • 1 Citation Count
  • H01L Class
  • 23.71 % this patent is cited more than
  • 7 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges3689997611243481558461392216162801 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +05001000150020002500300035004000450050005500600065007000750080008500900095001000010500

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