Semiconductor device including a vertical one-time programmable fuse that includes a conductive layer and a resistive material and a method of making the same
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United States of America Patent
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Oct 29, 2019
Grant Date -
Jan 25, 2018
app pub date -
Jul 7, 2017
filing date -
Jul 22, 2016
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Abstract
A vertical OTP fuse formed in a semiconductor device has a substrate and an insulating layer formed over the substrate with an opening through the insulating layer extending to the substrate. A conductive layer, such as silicide, is formed over a sidewall of the opening. A resistive material, such as polysilicon, is deposited within the opening over the first conductive layer to form a first vertical OTP fuse. A plurality of vertical OTP fuses can be arranged in an array. A PN junction diode or transistor is formed in the substrate aligned with the first vertical OTP fuse. A second conductive layer is formed over the first vertical OTP fuse. The first vertical OTP fuse can be disposed between the second conductive layer and a third conductive layer. A second vertical OTP fuse can be formed over the first vertical OTP fuse for redundancy.
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