Electrical antifuse having airgap or solid core
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United States of America Patent
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Aug 21, 2018
Grant Date -
Jan 25, 2018
app pub date -
Jun 6, 2017
filing date -
Jul 20, 2016
priority date (Note) -
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Abstract
An antifuse structure including an opening through a dielectric material to a contact surface and an antifuse material layer present within the opening. The antifuse material layer may be a phase change material alloy of tantalum and nitrogen, wherein at least a base surface of the antifuse material layer is present on the contact surface and sidewall surfaces of the antifuse material layer are present on sidewalls of the opening through the dielectric material. An airgap or solid material core may be in the opening atop the base surface of the phase change material alloy. An electrically conductive material may be in direct contact with at least the antifuse material layer.
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