FOCUS CENTERING METHOD FOR DIGITAL LITHOGRAPHY
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Jul 13, 2017
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Jul 19, 2016
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Abstract
Embodiments disclosed herein generally relate to adjusting a focus setting for a digital lithography system. The method includes scanning a surface of a photoresist. The photoresist is formed on a substrate. A focus setting for the digital lithography system is determined. A plurality of exposure location on the photoresist are located. A sidewall width of the exposure is measured for a plurality of focus settings. The focus setting is adjusted in response to determining a minimum sidewall width.
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