Thermal conditioning method

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United States of America Patent

PATENT NO 10095128
APP PUB NO 20180024446A1
SERIAL NO

15528187

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Abstract

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A method of thermally conditioning a physical object, includes guiding a two-phase cooling medium through a cooling duct of the physical object, wherein the guiding includes: guiding the two-phase cooling medium in a liquid phase via a pre-heating duct of the physical object from a supply side of the physical object at least partly towards a discharging side of the physical object, the two-phase cooling medium being pre-heated in the pre-heating duct; guiding the two-phase cooling medium from the pre-heating duct to a phase transitioning duct of the physical object, the two-phase cooling medium at least partly transitioning from the liquid phase towards a gas phase in the phase transitioning duct; guiding the two-phase cooling medium from the phase transitioning duct to a discharging duct of the physical object; and discharging at the discharging side the two-phase cooling medium from the discharging duct.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cadee, Theodorus Petrus Maria Asten, NL 46 447
De, Smet Benjamin Joseph Eindhoven, NL 1 0
Donders, Sjoerd Nicolaas Lambertus Vught, NL 253 8312
Verdonck, Adrianus Marinus Eindhoven, NL 3 16

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