IMAGE RECONSTRUCTION METHOD FOR X-RAY MEASURING DEVICE, STRUCTURE MANUFACTURING METHOD, IMAGE RECONSTRUCTION PROGRAM FOR X-RAY MEASURING DEVICE, AND X-RAY MEASURING DEVICE
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Feb 9, 2015
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Feb 9, 2015
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An image reconstruction method, includes: generating differential data indicating a difference between detection data generated by detecting X-ray that passed through a measurement object by irradiating X-rays to the measurement object and estimate data generated by estimating X-rays that are assumed to have been passed through an estimated structure having been generated by estimating a shape of the measurement object; and generating an image using the differential data and the estimated structure.
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