IMAGE RECONSTRUCTION METHOD FOR X-RAY MEASURING DEVICE, STRUCTURE MANUFACTURING METHOD, IMAGE RECONSTRUCTION PROGRAM FOR X-RAY MEASURING DEVICE, AND X-RAY MEASURING DEVICE
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United States of America Patent
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app pub date -
Feb 9, 2015
filing date -
Feb 9, 2015
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Abstract
An image reconstruction method, includes: generating differential data indicating a difference between detection data generated by detecting X-ray that passed through a measurement object by irradiating X-rays to the measurement object and estimate data generated by estimating X-rays that are assumed to have been passed through an estimated structure having been generated by estimating a shape of the measurement object; and generating an image using the differential data and the estimated structure.
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
NIKON CORPORATION | A CORP OF JAPAN 2-3 MARUNOUCHI 3-CHOME CHIYODA-KU TOKYO |
International Classification(s)

- 2015 Application Filing Year
- G01N Class
- 11310 Applications Filed
- 8345 Patents Issued To-Date
- 73.79 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
YAMADA, Atsushi | Yokohama-shi, JP | 406 | 3161 |
# of filed Patents : 406 Total Citations : 3161 |
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- 1 Citation Count
- G01N Class
- 40.30 % this patent is cited more than
- 7 Age
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