Micro mechanical devices with an improved recess or cavity structure
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 21, 2019
Grant Date -
Jan 25, 2018
app pub date -
Feb 12, 2015
filing date -
Feb 12, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A sensor includes a first substrate and a second substrate. The first substrate includes a first side and an opposing second side, with the first side having a recess. The recess is defined by one or more side walls and a bottom wall. One or more of the side walls are substantially perpendicular to the bottom wall. A sensing diaphragm is defined between the second side of the first substrate and the bottom wall of the recess. A boss extends from the bottom wall of the recess. The second substrate may include a first side and an opposing second side, where the first side has a recess. The first side of the first substrate may be secured to the first side of the second substrate such that the recess in the first substrate faces and is in fluid communication with the recess in the second substrate.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2015 Application Filing Year
- G01L Class
- 1174 Applications Filed
- 940 Patents Issued To-Date
- 80.07 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- G01L Class
- 34.98 % this patent is cited more than
- 6 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Nov 21, 2026 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Nov 21, 2030 |
