Force detection device
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United States of America Patent
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May 14, 2019
Grant Date -
Jan 25, 2018
app pub date -
Apr 4, 2016
filing date -
Apr 6, 2015
priority date (Note) -
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Abstract
A force detection device includes: a substrate; and a force transmission block. The substrate includes: a mesa gauge arranged on a principal plane of the substrate and providing a bridge circuit; a connection region arranged on the principal plane; and a sealing portion surrounding all around the mesa gauge and connected to the force transmission block. The mesa gauge includes: a first mesa gauge extending in a first direction; and a second mesa gauge extending in a second direction and spaced apart from the first mesa gauge. The connection region electrically connects the one end of the first mesa gauge and the one end of the second mesa gauge.
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