STATIC PRESSURE GAS BEARING
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United States of America Patent
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Sep 25, 2017
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Mar 31, 2015
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Abstract
A static pressure gas bearing used in a vacuum environment includes a guide shaft and a tubular slider which is movable in an axial direction in a state where the guide shaft is accommodated therein. The slider is configured by fastening a plurality of plate-shaped members. A film formed of a soft material having a smaller elastic modulus than that of each of the plate-shaped members is interposed between joint surfaces of the plate-shaped members.
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