POLISHING COMPOSITION

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United States of America Patent

SERIAL NO

15549503

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention provides a polishing composition capable of polishing a simple substance of silicon at a higher polishing speed.

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Patent Owner(s)

Patent OwnerAddress
FUJIMI INCORPORATED1-1 CHIRYO 2-CHOME NISHIBIWAJIMA-CHO KIYOSU-SHI AICHI 452-5802

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
IZAWA, YOSHIHIRO Aichi, JP 35 574

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