METHOD AND DEVICE FOR DETACHING A SUBSTRATE FROM A SUBSTRATE STACK
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United States of America Patent
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Jan 14, 2015
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Jan 14, 2015
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A method and device for detaching a carrier substrate from a substrate stack, which is formed by the carrier substrate and a product substrate, as well as a bonding layer bonding the carrier substrate and the product substrate. The bonding layer has an adhesive strength for bonding the carrier substrate and the product substrate, and the adhesive strength is at least partially reduced by a beam of electromagnetic radiation directed at least predominantly on the bonding layer.
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