Roll type imprint master mold, method of manufacturing the same, and imprint method using the same
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United States of America Patent
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Sep 15, 2020
Grant Date -
Jan 25, 2018
app pub date -
Jul 17, 2017
filing date -
Jul 19, 2016
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Abstract
A method of manufacturing a roll type imprint master mold including disposing a base layer on a substrate including a first area and a second area adjacent to the first area, disposing an inorganic insulation layer on the base layer, forming a first mask pattern and a first resin pattern in the first area, forming a pattern layer by etching the inorganic insulation layer using the first resin and the first mask patterns as a mask, removing the first resin and the first mask patterns, forming a second mask pattern and a second resin pattern in the second area, forming a pattern layer by etching the inorganic insulation layer using the second resin and the second mask patterns as a mask, removing the second resin and the second mask patterns, separating the base layer from the substrate, and attaching the base layer onto a roll body.
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