Oven controlled MEMS oscillator
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United States of America Patent
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Sep 4, 2018
Grant Date -
Jan 18, 2018
app pub date -
Jul 14, 2016
filing date -
Jul 14, 2016
priority date (Note) -
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Abstract
An oven controlled MEMS timing device that includes a very small oscillator that can be heated very rapidly with very low power. The MEMS device includes a rectangular frame, a heated platform positing in the frame, and a pair of support beams that extend from the rectangular frame and hold the platform within a cavity of the frame to thermally isolate the platform. Moreover, the device includes a resonator attached to the platform by a pair of anchor beams, a heater that heats the platform to maintain a target temperature for the resonator and a thermistor that measures a temperature of the platform to provide a control loop for the heater.
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