Piezoelectric MEMS resonator with a high quality factor
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United States of America Patent
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May 14, 2019
Grant Date -
Jan 18, 2018
app pub date -
Jul 12, 2016
filing date -
Jul 12, 2016
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Abstract
A MEMS resonator is provided with a high quality factor and lower motional impedance. The MEMS resonator includes a silicon layer having opposing surfaces, a piezoelectric layer above one of the surfaces of the silicon layer, and a pair of electrodes disposed on opposing surfaces of the piezoelectric layer, respectively. Moreover, the piezoelectric layer has a crystallographic axis that extends at an angle relative to the vertical axis of the MEMS resonator.
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