Bulk acoustic wave resonator device
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United States of America Patent
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Aug 25, 2020
Grant Date -
Jan 18, 2018
app pub date -
Jun 30, 2017
filing date -
Jul 14, 2016
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Abstract
A bulk acoustic wave resonator device includes: a substrate; a lower electrode disposed on the substrate; a piezoelectric layer disposed over a portion of the lower electrode; an upper electrode disposed on the piezoelectric layer; and a shape control layer covering an edge of a cavity disposed between the substrate and the lower electrode, wherein tensile stress is applied to the shape control layer during formation of the shape control layer.
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