Formation of carbon nanotube-containing devices
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United States of America Patent
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Mar 26, 2019
Grant Date -
Jan 18, 2018
app pub date -
Sep 28, 2017
filing date -
Feb 18, 2016
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Abstract
A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bi-functional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.
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