DEPOSITION APPARATUS
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United States of America Patent
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Issued Date -
Jan 18, 2018
app pub date -
Feb 10, 2017
filing date -
Jul 12, 2016
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Abstract
A deposition apparatus includes a chamber, a first stage and a second stage for supporting substrates within the chamber, an evaporating source assembly moving a first stage area corresponding to the first stage and a second stage area corresponding to the second stage, and including a plurality of nozzles through which a source material is spurted, and a photographing assembly which is disposed between the first stage and the second stage and photographs the plurality of nozzles.
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