Top electrode for device structures in interconnect

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10276790
APP PUB NO 20180019390A1
SERIAL NO

15715413

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Abstract

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Some embodiments relate to an integrated circuit device, which includes a bottom electrode, a dielectric layer, and top electrode. The dielectric layer is disposed over the bottom electrode. The top electrode is disposed over the dielectric layer, and an upper surface of the top electrode exhibits a recess. A via is disposed over the top electrode. The via makes electrical contact with only a tapered sidewall of the recess without contacting a bottom surface of the recess.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Chih-Yang Yuanlin Township, TW 131 1575
Chen, Hsia-Wei Taipei, TW 98 1137
Chu, Wen-Ting Kaohsiung, TW 266 2771
Liao, Yu-Wen New Taipei, TW 114 1456
Shih, Sheng-Hung Hsinchu, TW 80 629
Tu, Kuo-Chi Hsin-Chu, TW 216 2369
Yang, Chin-Chieh New Taipei, TW 84 1278
You, Wen-Chun Dongshan Township, TW 36 517

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