Fabrication of an isolated dummy fin between active vertical fins with tight fin pitch
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United States of America Patent
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Mar 27, 2018
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N/A
app pub date -
Mar 30, 2017
filing date -
Jul 12, 2016
priority date (Note) -
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Abstract
A method of forming an arrangement of active and inactive fins on a substrate, including forming at least three vertical fins on the substrate, forming a protective liner on at least three of the at least three vertical fins, removing at least a portion of the protective liner on the one of the at least three of the at least three of vertical fins, and converting the one of the at least three of the at least three vertical fins to an inactive vertical fin.
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