Fabrication of an isolated dummy fin between active vertical fins with tight fin pitch
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United States of America Patent
Stats
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Mar 27, 2018
Issued Date -
N/A
app pub date -
Mar 30, 2017
filing date -
Jul 12, 2016
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A method of forming an arrangement of active and inactive fins on a substrate, including forming at least three vertical fins on the substrate, forming a protective liner on at least three of the at least three vertical fins, removing at least a portion of the protective liner on the one of the at least three of the at least three of vertical fins, and converting the one of the at least three of the at least three vertical fins to an inactive vertical fin.
First Claim
Other Claims data not available
Family
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| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| US | B1 | US9853131 | Jul 12, 2016 |
| US | B2 | US10170595 | Aug 07, 2017 |
| US | B2 | US10170596 | Jan 22, 2018 |
International Classification(s)
- 2017 Application Filing Year
- H01L Class
- 30754 Applications Filed
- 25260 Patents Issued To-Date
- 82.14 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 6 Citation Count
- H01L Class
- 23.71 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Sep 27, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Sep 27, 2029 |
