Semiconductor device
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United States of America Patent
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Jul 16, 2019
Grant Date -
Jan 18, 2018
app pub date -
Mar 3, 2017
filing date -
Jul 13, 2016
priority date (Note) -
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Abstract
A semiconductor device includes a lower electrode structure, an upper electrode structure, and a dielectric layer between the lower and upper electrode structures and on side surfaces and an upper surface of the lower electrode structure. The lower electrode structure includes a first lower electrode pattern having a cylindrical shape, a barrier layer on the first lower electrode pattern, and a second lower electrode pattern in a space defined by the barrier layer.
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