SUBSTRATE TRANSFER ROBOT AND SUBSTRATE TRANSFER METHOD
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United States of America Patent
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app pub date -
Feb 1, 2016
filing date -
Feb 3, 2015
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Abstract
This substrate transfer robot includes: a robot arm to which a substrate holding portion for holding a substrate is movably provided; a robot control unit for controlling each operation of the robot arm and the substrate holding portion; and a substrate detection unit provided to the robot arm and for detecting an edge portion of the substrate held by the substrate holding portion. The substrate detection unit detects at least two parts of the edge portion of the substrate when the substrate holding portion is moved with respect to the robot arm. The robot control unit corrects a substrate transfer operation based on a detection result of the edge portion of the substrate. Thus, even when a substrate held by a substrate holding portion is deviated from a regular position, the substrate can be transferred without difficulty.
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