SUBSTRATE TRANSFER DEVICE AND BONDING SYSTEM
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Jan 18, 2018
app pub date -
Jul 7, 2017
filing date -
Jul 12, 2016
priority date (Note) -
Published
status (Latency Note)
![]() |
A preliminary load of PAIR data current through [] has been loaded. Any more recent PAIR data will be loaded within twenty-four hours. |
PAIR data current through []
A preliminary load of cached data will be loaded soon.
Any more recent PAIR data will be loaded within twenty-four hours.
![]() |
Next PAIR Update Scheduled on [ ] |

Importance

US Family Size
|
Non-US Coverage
|
Abstract
A substrate transfer device for transferring a first substrate and a second substrate to a bonding apparatus configured to bond the first substrate and the second substrate, includes a first holding part configured to hold the first substrate from an upper surface side, a lower surface of the first substrate serving as a bonding surface, and a second holding part provided below the first holding part and configured to hold the second substrate from a lower surface side so that the second substrate faces the first substrate, a upper surface of the second substrate serving as a bonding surface to be bonded to the lower surface of the first substrate.
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
TOKYO ELECTRON LIMITED | 3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 1076325 |
International Classification(s)

- 2017 Application Filing Year
- H01L Class
- 30754 Applications Filed
- 25260 Patents Issued To-Date
- 82.14 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
ISHIMARU, Kazutoshi | Koshi City, JP | 5 | 66 |
# of filed Patents : 5 Total Citations : 66 | |||
IWASHITA, Yasuharu | Koshi City, JP | 9 | 54 |
# of filed Patents : 9 Total Citations : 54 | |||
KATSUKI, Shingo | Koshi City, JP | 5 | 49 |
# of filed Patents : 5 Total Citations : 49 | |||
KOGA, Takashi | Koshi City, JP | 25 | 197 |
# of filed Patents : 25 Total Citations : 197 | |||
MASUNAGA, Takahiro | Koshi City, JP | 5 | 38 |
# of filed Patents : 5 Total Citations : 38 | |||
MATSUNAGA, Masataka | Koshi City, JP | 13 | 74 |
# of filed Patents : 13 Total Citations : 74 | |||
SAKATA, Fumio | Koshi City, JP | 6 | 26 |
# of filed Patents : 6 Total Citations : 26 | |||
UMITSUKI, Masaaki | Koshi City, JP | 3 | 11 |
# of filed Patents : 3 Total Citations : 11 |
Cited Art Landscape
- No Cited Art to Display

Patent Citation Ranking
- 1 Citation Count
- H01L Class
- 23.71 % this patent is cited more than
- 7 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jul 18, 2025 |
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jul 18, 2029 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

Legal Events
- No Legal Status data available.

Matter Detail

Renewals Detail
