RETICLE PURGING SYSTEM AND METHOD THEREOF
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United States of America Patent
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Jul 12, 2016
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Jul 12, 2016
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Abstract
A reticle purging system includes an automated pod opener, a reticle holding device, a reticle transporting device and at least one purging device. The reticle holding device has a reticle occupiable zone thereon. The reticle transporting device is assigned with a transportation path from the automated pod opener to the reticle holding device. The reticle occupiable zone is exposed to the purging device.
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