NON-VOLATILE MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
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United States of America Patent
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Jan 18, 2018
app pub date -
Jul 12, 2017
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Jul 13, 2016
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Provided are a non-volatile memory device and a method of fabricating the same. The non-volatile memory includes a channel layer, a data storage layer disposed on the channel layer, a plurality of control gates arranged on the data storage layer and spaced apart from one another, and conductive cover layers disposed on sidewalls of the control gates facing each other. The plurality of control gates includes a first conductor having a first work function. The conductive cover layers include a second conductor having a second work function that is greater than the first work function.
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