PRODUCTION OF A SEMICONDUCTOR SUPPORT BASED ON GROUP III NITRIDES

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United States of America Patent

SERIAL NO

15545288

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Abstract

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The invention relates to a method for producing a support for the production of a semiconductor structure based on group III nitrides, characterised in that the method comprises the steps of:

    formation (100) of a buffer layer (20) on a substrate (10), said buffer layer comprising an upper surface layer based on group III nitrides,and deposition (200) of a crystalline layer (30) on the buffer layer, said crystalline layer being deposited from silicon atoms so as to cover the entire surface of the upper layer based on group III nitrides.

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Patent Owner(s)

Patent OwnerAddress
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)3 RUE MICHEL ANGE PARIS 75016

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
FRAYSSINET, Eric MOUANS SARTOUX, FR 7 135
MASSIES, Jean VALBONNE, FR 11 96
SEMOND, Fabrice CANNES, FR 11 116

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