Method for RF power distribution in a multi-zone electrode array
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United States of America Patent
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Sep 15, 2020
Grant Date -
Jan 18, 2018
app pub date -
Jul 12, 2017
filing date -
Jul 14, 2016
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Abstract
Embodiments of systems and methods for RF power distribution in a multi-zone electrode array are described. A system may include a plasma source configured to generate a plasma field. Also, the system may include an RF power source coupled to the plasma source and configured to supply RF power to the plasma source. The system may also include a source controller coupled to the RF power source and configured to control modulation of the RF power supplied to the plasma source to enhance uniformity of a plasma field generated by the plasma source.
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