Manufacturing device, system and method for outputting a manufacturing process flow having the shortest total process time among a plurality of manufacturing process flows
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United States of America Patent
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Feb 12, 2019
Grant Date -
Jan 18, 2018
app pub date -
May 12, 2017
filing date -
Jul 15, 2016
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Abstract
A manufacturing device inputs design information including three-dimensional structure data, generates a manufacturing process flow, and displays the manufacturing process flow on a screen for a user to check, modify, and confirm the flow based on design information and setting information. A process method includes a first process method of a direct modeling method having an FIB method and a second process method of a semiconductor manufacturing process method which is a non-FIB method. The manufacturing device generates a plurality of manufacturing process flows by a combination of cases where each of the process methods is applied to each of the regions of the three-dimensional data. The manufacturing process flow includes a process device, the process method, a control parameter value, a process time, and a total process time for each of process steps. An output unit outputs a manufacturing process flow having, for example, the shortest total process time.
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