Stage apparatus, lithography apparatus, and method of manufacturing article
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 22, 2019
Grant Date -
Jan 18, 2018
app pub date -
Jul 6, 2017
filing date -
Jul 14, 2016
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present invention provides a stage apparatus including a plate, wherein the plate includes a first plate member, a second plate member, and a third plate member, at least one surface out of a first surface of the first plate member on a side of the second plate member and a second surface of the second plate member on a side of the first plate member includes a first concave portion configured to form a first channel extending in a direction along the surface, at least one surface out of a third surface of the second plate member on a side of the third plate member and a fourth surface of the third plate member on the side of the second plate member includes a second concave portion configured to form a second channel extending in a direction along the surface.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2017 Application Filing Year
- H01L Class
- 30754 Applications Filed
- 25260 Patents Issued To-Date
- 82.14 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 6 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jul 22, 2026 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jul 22, 2030 |
