Stage apparatus, lithography apparatus, and method of manufacturing article
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United States of America Patent
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Jan 22, 2019
Grant Date -
Jan 18, 2018
app pub date -
Jul 6, 2017
filing date -
Jul 14, 2016
priority date (Note) -
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Abstract
The present invention provides a stage apparatus including a plate, wherein the plate includes a first plate member, a second plate member, and a third plate member, at least one surface out of a first surface of the first plate member on a side of the second plate member and a second surface of the second plate member on a side of the first plate member includes a first concave portion configured to form a first channel extending in a direction along the surface, at least one surface out of a third surface of the second plate member on a side of the third plate member and a fourth surface of the third plate member on the side of the second plate member includes a second concave portion configured to form a second channel extending in a direction along the surface.
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