Developing method and developing device
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United States of America Patent
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app pub date -
Jul 12, 2017
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Jul 18, 2016
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Abstract
A developing device includes a spraying assembly and a concentration regulating assembly. A developing method usable in the developing device includes: spraying developing agents by a spraying assembly onto respective developing regions on a substrate to be developed; and spraying a regulating liquid by a concentration regulating assembly onto a target developing region on the substrate to be developed to change concentration of the developing agents.
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