Imprint apparatus and method of manufacturing article
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United States of America Patent
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Dec 22, 2020
Grant Date -
Jan 18, 2018
app pub date -
Jun 29, 2017
filing date -
Jul 12, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention provides an imprint apparatus which forms a pattern of an imprint material on a substrate by using a mold, the apparatus including a mold holding unit configured to hold the mold, a substrate holding unit configured to hold the substrate, an image capturing unit configured such that a field of view of the image capturing unit includes a pattern region of the mold held by the molding unit, and a control unit configured to determine, based on an image obtained by capturing at least one of the mold and the substrate by the image capturing unit after a mold separating operation for separating the mold from a cured imprint material on the substrate, whether an abnormality is generated in the mold separating operation.
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