PHOTOCURABLE COMPOSITION FOR IMPRINT, METHOD OF PRODUCING CURED FILM, METHOD OF PRODUCING OPTICAL COMPONENT, METHOD OF PRODUCING CIRCUIT BOARD, AND METHOD OF PRODUCING ELECTRONIC COMPONENT

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United States of America Patent

SERIAL NO

15537006

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Abstract

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The present invention relates to a photocurable composition for imprint in a condensable gas atmosphere. The composition at least includes a polymerizable compound component (A) and photopolymerization initiator component (B) and satisfies the Requirement (1):

    a value ECG of greater than or equal to 2.30 GPa,where ECG denotes the reduced modulus (GPa) of a photocured film prepared by exposing the photocurable composition for imprint to light at an exposure dose of 200 mJ/cm' in an atmosphere containing a condensable gas in a concentration of 90% by volume or more.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHATOKYO TOKYO METROPOLIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iimura, Akiko Utsunomiya-shi, JP 17 103
Ito, Toshiki Kawasaki-shi, JP 132 711
Iwashita, Kazumi Kobe-shi, JP 8 25
Kato, Jun Yokohama-shi, JP 125 866
Yamashita, Keiji Utsunomiya-shi, JP 75 311

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