SUPPORT FRAME FOR PELLICLES
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United States of America Patent
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Oct 29, 2015
filing date -
Jan 29, 2015
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Abstract
A pellicle support frame includes a frame body made of aluminum alloy. The frame body has a top surface onto which a pellicle film is bonded and also has an underside surface onto which a transparent substrate is bonded. The frame body has a height not less than 1 mm and not more than 6 mm in a top-underside direction. Grooves are formed on the top surface and the underside surface of the frame body. The grooves each have a depth not less than 0.2 mm. The structure described above makes it possible to machine the support frame more easily and also to prevent deformation of the transparent substrate when the support frame is bonded to the transparent substrate.
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