Semiconductor-Based Gas Sensor Assembly for Detecting a Gas and Corresponding Production Method
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Dec 10, 2015
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Dec 22, 2014
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A semiconductor-based gas sensor assembly for detecting a gas includes a gas-sensitive structure with a gas electrode, an electrode, and a dielectric layer, and also includes a readout transistor and a substrate. The dielectric layer is positioned between the gas electrode and the electrode, and is at least partially polarized. The readout transistor is positioned in or on the substrate, and includes a gate. The gas-sensitive structure is configured to form a capacitance that is coupled to the gate of the readout transistor.
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