Examination device
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United States of America Patent
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Oct 23, 2018
Grant Date -
Jan 18, 2018
app pub date -
Jan 26, 2016
filing date -
Jan 30, 2015
priority date (Note) -
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Abstract
The present invention provides an inspection device that is capable of detecting foreign matter with high accuracy, the inspection device including: a light source; an electro-optic element on which light from the light source is incident and which changes a phase of the light into at least two states; and a controller. The controller corrects a phase fluctuation of the electro-optic element itself, using intensity modulation characteristics of the eletro-optic element which are obtained by changing an applied voltage that is input to the electro-optic element.
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