Sensor device, gyro sensor, and electronic apparatus
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United States of America Patent
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Sep 15, 2020
Grant Date -
Jan 18, 2018
app pub date -
Oct 20, 2015
filing date -
Dec 1, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
Provided is a sensor device that includes a vibrator unit, an annular base portion, a plurality of coupling portions, and a wiring layer. The wiring layer includes a plurality of drive wirings and a plurality of detection wirings. The plurality of drive wirings are respectively connected to first and second drive electrodes while being adjacent and parallel to one another. The plurality of detection wirings are respectively connected to first and second detection electrodes while being adjacent and parallel to one another. The wiring layer is provided at each of the plurality of coupling portions to electrically connect a plurality of terminal portions provided in the base portion with a plurality of piezoelectric drive units and first and second piezoelectric detection units provided in the vibrator unit.
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