Measuring head and eccentricity measuring device including the same
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United States of America Patent
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Jan 8, 2019
Grant Date -
Jan 18, 2018
app pub date -
Sep 27, 2017
filing date -
Mar 27, 2015
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Abstract
A measuring head includes a light source unit, a first image pickup element, a second image pickup element, an objective optical system, an optical path splitting element, a common optical path, a first optical path, and a second optical path. The common optical path is located on one side of the optical path splitting element, and the first optical path and a second optical path are located on the other side. The optical path splitting element is disposed at a position where the first optical path and the second optical path intersect. The light source unit and the first image pickup element are disposed at predetermined positions. The second image pickup element is disposed at a position different from the predetermined positions. Each of the predetermined positions is a focal position of the objective optical system or a position conjugate to the focal position of the objective optical system.
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