METHOD FOR PRODUCING NANOIMPRINT TRANSFER BODY
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Jul 11, 2017
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Jul 13, 2016
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Abstract
A method for producing a nanoimprint transfer body includes the steps of: forming, on a substrate, a film including a block copolymer capable of microphase separation and an inorganic precursor incorporated in one polymer block component constituting the block copolymer or a polymer phase including the polymer block component; subjecting the block copolymer to microphase separation to form a microphase separated structure including the block copolymer and the inorganic precursor incorporated in the polymer block component or the polymer phase including the polymer block component; removing organic components from the microphase separated structure to form a nanostructure of an inorganic component; and forming a nanoimprint transfer body by using the nanostructure as a master mold.
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