MULTI-LAYER COATING WITH DIFFUSION BARRIER LAYER AND EROSION RESISTANT LAYER

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United States of America Patent

SERIAL NO

15646602

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Abstract

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A multi-layer coating for a surface of an article comprising a diffusion barrier layer and an erosion resistant layer. The diffusion barrier layer may be a nitride film including but not limited to TiNx, TaNx, Zr3N4, and TiZrxNy. The erosion resistant layer may be a rare oxide film including but not limited to YF3, Y2O3, Er2O3, Al2O3, ZrO2, ErAlxOy, YOxFy, YAlxOy, YZrxOy and YZrxAlyOz. The diffusion barrier layer and the erosion resistant layer may be deposited on the article's surface using a thin film deposition technique including but not limited to, ALD, PVD, and CVD.

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Patent Owner(s)

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APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fenwick, David Los Altos Hills, US 34 1768
Sun, Jennifer Y Mountain View, US 261 13472
Wu, Xiaowei San Jose, US 87 1823

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