VACUUM CHAMBER HAVING A SPECIAL DESIGN FOR INCREASING THE REMOVAL OF HEAT
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United States of America Patent
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Jan 15, 2016
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Jan 19, 2015
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Abstract
The invention relates to a vacuum chamber for the treatment of substances, comprising at least the following elements:
- heat supply elements for the heat supply into a treatment area of the vacuum chamber, in which at least one substrate (10) can be treated,a chamber wall (20), through which heat can be removed from the treatment area, comprising an inner and an outer chamber wall side, anda shielding wall (30), which is arranged between the chamber wall (20) and the treatment area, such that an averted shielding wall side regarding to the treatment area is placed opposite the inner chamber wall side,and characterized in, thatthe shielding wall side placed opposite the inner chamber wall side is at least partially, preferred largely applied with a first coating (31), which has an emission coefficient ε≧0.65.
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