Laminate for treatment of a wafer device, temporary adhesion composition, and temporary adhesion film
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United States of America Patent
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May 14, 2019
Grant Date -
Jan 18, 2018
app pub date -
Sep 21, 2017
filing date -
Mar 23, 2015
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Abstract
A laminate includes, sequentially and adjacent to each other: a first base material; a temporary adhesion film; and a second base material, in which the tensile elastic modulus E of the temporary adhesion film at 25° C. in conformity with JIS K 7161:1994 is in a range of 25 to 2000 MPa. A base material is peeled off by fixing any one of the first base material and the second base material of the laminate at 25° C. and pulling an end portion of the other base material up in a direction perpendicular to the surface of the other base material from an interface with the temporary adhesion film at a speed of 50 mm/min, and the force applied during the pulling is measured using a force gauge and the value is 0.33 N/mm or less.
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