METHOD FOR PREPARING NANO-PATTERN, AND NANO-PATTERN PREPARED THEREFROM

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United States of America Patent

SERIAL NO

15612936

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Abstract

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Provided are a method for manufacturing a nano-pattern including: increasing a temperature of a self-assembling material applied on a substrate through light irradiation to form a self-assembly pattern, and a nano-pattern manufactured thereby. More particularly, the present invention relates to a method for manufacturing a nano-pattern capable of implementing various circuit patterns through simple dragging without using a photoresist pattern or chemical pattern in advance, implementing the nano-pattern on a substrate having a three-dimensional structure such as a flexible substrate as well as a flat substrate, and performing a process without a specific environmental restriction. In addition, the present invention relates to a method for manufacturing a nano-pattern capable of forming a large-area self-assembly pattern within a very short time, that is, several to several ten milliseconds (ms) by instantly irradiating high-energy flash light to instantly perform thermal annealing.

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Patent Owner(s)

Patent OwnerAddress
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY291 DAEHAK-RO YUSEONG-GU DAEJEON 34141 34141

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
JIN, Hyeong Min Daejeon, KR 1 2
KIM, Ju Young Daejeon, KR 107 594
KIM, Sang Ouk Daejeon, KR 23 303
LEE, Keon Jae Daejeon, KR 40 5082
LEE, Seung Hyun Daejeon, KR 194 881

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