Methods of manufacture for MEMS switches with reduced switching voltage
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United States of America Patent
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May 12, 2020
Grant Date -
Jan 18, 2018
app pub date -
Sep 27, 2017
filing date -
Apr 22, 2008
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Abstract
An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode over a first fixed electrode, forming a second cantilevered electrode with an end that overlaps the first cantilevered electrode, forming a third cantilevered electrode operable to directly contact the first cantilevered electrode upon an application of a voltage to a second fixed electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.
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