Process for Reducing the Assembly Time of Ordered Films of Block Copolymer

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United States of America Patent

SERIAL NO

15545134

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Abstract

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The present invention relates to a process for reducing the assembly time comprising a block copolymer (BCP). The invention also relates to the compositions used to obtain these ordered films and to the resulting ordered films that can be used in particular as masks in the lithography field.

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Patent Owner(s)

Patent OwnerAddress
ARKEMA FRANCECOLOGNE FRANCE COLOMBE HAUTS-DE-SEINE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chevalier, Xavier Grenoble, FR 43 93
Inoubli, Raber Pau, FR 32 36
Navarro, Christophe Bayonne, FR 72 263
Nicolet, Celia Sauvagnon, FR 27 45

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