Abatement device
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United States of America Patent
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Apr 14, 2020
Grant Date -
Jan 18, 2018
app pub date -
Nov 5, 2015
filing date -
Nov 14, 2014
priority date (Note) -
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Abstract
Provided is an abatement device that reduces an amount of drainage of circulating water. The abatement device lowers an average drainage flow of circulating water to a low flow, when a ratio of a concentration of silicon dioxide within the circulating water and a concentration of hydrogen fluoride within the circulating water is greater than or equal to a predetermined value at which hydrofluorosilicic acid can be produced, and raises the average drainage flow of the circulating water to a high flow higher than the low flow, when the ratio of the concentration of silicon dioxide within the circulating water and the concentration of hydrogen fluoride within the circulating water is less than the predetermined value.
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