Acoustic resonator and method
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United States of America Patent
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Jul 21, 2020
Grant Date -
Jan 11, 2018
app pub date -
Dec 27, 2016
filing date -
Jul 7, 2016
priority date (Note) -
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Abstract
An acoustic resonator including a substrate, an active vibration region including, sequentially stacked on the substrate, a lower electrode, a piezoelectric layer, and an upper electrode, and a horizontal resonance suppressing part formed from and disposed in the piezoelectric layer, the horizontal resonance suppressing part having piezoelectric physical properties that are different from piezoelectric physical properties of the piezoelectric layer.
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