Bulk acoustic wave filter device and method of manufacturing the same
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United States of America Patent
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Apr 28, 2020
Grant Date -
Jan 11, 2018
app pub date -
Jun 13, 2017
filing date -
Jul 7, 2016
priority date (Note) -
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Abstract
A bulk acoustic wave filter device includes a substrate, a lower electrode on the substrate, a piezoelectric layer covering at least a portion of the lower electrode, and an upper electrode covering at least a portion of the piezoelectric layer. The upper electrode has a density reduction layer disposed on at least a portion thereof, except a central portion of a resonance region of the bulk acoustic wave filter device that deforms and vibrates with the piezoelectric layer during activation of the piezoelectric layer. The density reduction layer has a density lower than a density of other portions of the upper electrode.
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