Fluorine-containing plasma polymerized HMDSO for OLED thin film encapsulation

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United States of America Patent

PATENT NO 10181581
APP PUB NO 20180013097A1
SERIAL NO

15700681

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Abstract

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Methods for forming an OLED device are described. An encapsulation structure having organic buffer layer sandwiched between barrier layers is deposited over an OLED structure. The buffer layer is formed with a fluorine-containing plasma. The second barrier layer is then deposited over the buffer layer. Additionally, to ensure good adhesion, a buffer adhesion layer is formed between the buffer layer and the first barrier layer. Finally, to ensure good transmittance, a stress reduction layer is deposited between the buffer layer and the second barrier layer.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Jrjyan Jerry Campbell, US 45 686

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