Thin film transistor, a thin film transistor array panel including the same, and a method of manufacturing the same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 5, 2018
Issued Date -
Jan 11, 2018
app pub date -
Mar 27, 2017
filing date -
Jul 5, 2016
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A thin film transistor includes a semiconductor layer, a gate electrode, and an insulating layer. The semiconductor layer includes a source electrode, a drain electrode, and a channel part disposed therebetween. The gate electrode is disposed on the channel part and extends in a direction crossing a channel length direction of the semiconductor layer. The insulating layer includes a second region connected to the first region and extending in a same direction as an extending direction of the gate electrode from the first region. A hydrogen content of the source electrode or the drain electrode is in a range between a maximum hydrogen content that is larger than a hydrogen content of the second region of the insulating layer by about 10% and a minimum hydrogen content that is smaller than the hydrogen content of the second region of the insulating layer by about 10%.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2017 Application Filing Year
- H01L Class
- 30754 Applications Filed
- 25260 Patents Issued To-Date
- 82.14 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 2 Citation Count
- H01L Class
- 23.71 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Dec 5, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 5, 2029 |
