Semiconductor device and method of manufacturing the same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 29, 2018
Issued Date -
N/A
app pub date -
Apr 27, 2017
filing date -
Jul 8, 2016
priority date (Note) -
In Force
status (Latency Note)
Importance
|
US Family Size
|
Non-US Coverage
|
|
Patent Longevity
|
Forward Citations
|
Abstract
An improvement is achieved in the reliability of a semiconductor device. In a memory cell region, a plurality of fins are provided which are portions of a semiconductor substrate extending in an x-direction along a main surface of the semiconductor substrate and spaced apart from each other in a y-direction orthogonal to the x-direction along the main surface of the semiconductor substrate. Between the fins adjacent to each other in the y-direction, a portion of an upper surface of an isolation region is at a position higher than a surface obtained by connecting a position of the upper surface of the isolation region which is in contact with a side wall of one of the fins to a position of the upper surface of the isolation region which is in contact with a side wall of the other fin. In a cross section along the y-direction, the upper surface of the isolation region has a projecting shape.
First Claim
Other Claims data not available
Family
| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| JP | B2 | JP6688698 | Jul 08, 2016 |
| CN | B | CN107591449 | Jun 21, 2017 |
| EP | A2 | EP3267471 | Jun 27, 2017 |
| TW | B | TWI726125 | Jul 04, 2017 |
| US | B2 | US10211216 | Apr 24, 2018 |
| US | B2 | US10483275 | Jan 09, 2019 |
International Classification(s)
- 2017 Application Filing Year
- H01L Class
- 30754 Applications Filed
- 25260 Patents Issued To-Date
- 82.14 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- H01L Class
- 23.71 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Nov 29, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Nov 29, 2029 |
