RUTHENIUM WIRING AND MANUFACTURING METHOD THEREOF

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Jun 29, 2017
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Jul 6, 2016

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Abstract

There is provided a ruthenium wiring, including: a TiON film formed as a base film in a recess formed in a predetermined film on a surface of a substrate; and a ruthenium film formed on the TiON film so as to fill the recess.

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Patent Owner(s)

Patent Owner	Address
TOKYO ELECTRON LIMITED	TOKYO

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
FUJISATO, Toshiaki	Nirasaki City, JP	23	1710
HAN, Cheonsoo	Nirasaki City, JP	6	348
ISHIZAKA, Tadahiro	Nirasaki City, JP	118	6906

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RUTHENIUM WIRING AND MANUFACTURING METHOD THEREOF

Number of patents in Portfolio can not be more than 2000

United States of America Patent

15637780

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15637780

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